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D. Han and V. Kaajakari, "Microstructured polymer for shoe power generation", Transducers 2009, International Solid-State Sensors, Actuators and Microsystems Conference, pp. 1393-1396 , Denver, CO, June 21-25, 2009.
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W. Clower, E. Rodrique, C. Wilson, and V. Kaajakari, "Electrical control for wet etching of quartz resonators", IEEE Int. Frequency Control Symposium, pp. 939-942, Besancon, France, Apr. 20-24, 2009.
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E. Rodrique and V. Kaajakari, "Electrochemical etching of quartz", IEEE Int. Ultrasonics Symposium, pp. 2586-2589, New York, NY, Oct. 28-31, 2007.
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M. Koskenvuori, V. Kaajakari, T. Mattila, and I. Tittonen, "Temperature Measurement and Compensation Based on Two Vibrating Modes of a Bulk Acoustic Mode Microresonator", MEMS’08. Proceedings of the 21st IEEE International Conference on Micro Electro Mechanical Systems, pp. 78-81, Tucson, AZ, Jan. 13-17, 2008.
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V. Kaajakari,
J. Kiihamäki, H. Kuisma, V. Kokkala, and M. Tuohiniemi, "Stability of wafer level vacuum
encapsulated silicon resonators", 2nd International Conference
on Wafer Bonding for MEMS Technologies, Halle, Germany, pp. 59-60,
Apr. 9-11, 2006. Invited
-
V. Kaajakari, J. Koskinen, T. Mattila, P. Rantakari, J. Kiihamäki, M.
Koskenvuori, I. Tittonen, and A. Oja, "Low noise silicon micromechanical
bulk acoustic wave oscillator", IEEE International Ultrasonics Symposium, Rotterdam, Netherlands, pp. 1299-1302, Sep. 18-21, 2005.
- A. T. Alastalo and V. Kaajakari, "Designing capacitively coupled
microelectromechanical filters", IEEE International Ultrasonics Symposium,
Rotterdam, Netherlands, pp. 1588-1591, Sep. 18-21, 2005.
- O. Holmgren, K. Kokkonen, V. Kaajakari, A. Oja, and J. V. Knuuttila,
"Direct optical measurement of the Q values of RF-MEMS resonators", IEEE
International Ultrasonics Symposium, Rotterdam, Netherlands, pp. 2112-2115, Sep. 18-21,
2005.
- V.Kaajakari,
J. Kiihamäki, A. Oja, H. Seppä, S.
Pietikäinen, V. Kokkala, and H. Kuisma,
"Stability of wafer level vacuum
encapsulated single-crystal silicon
resonators",
The 13th International Conference on Solid-State Sensors, Actuators and
Microsystems, Seoul, Korea, pp. 916 - 919, June 5-9, 2005.
Download
- P. Rantakari, V.Kaajakari,
T. Mattila, J. Kiihamäki, A.
Oja, I. Tittonen, and H. Seppä,
"Low noise, low power micromechanical oscillator",
The 13th International Conference on Solid-State Sensors, Actuators and
Microsystems, Seoul, Korea, pp. 2135-2138, June 5-9, 2005.
- J. Kiihamäki, V.Kaajakari,
H. Luoto, H. Kattelus, and M. Yli-Koski,
"Fabrication of single crystal silicon
resonators with narrow gaps",
The 13th International Conference on Solid-State Sensors, Actuators and
Microsystems, Seoul, Korea, pp. 1354-1357, June 5-9, 2005.
- O. Holmgren, K. Kokkonen, T. Mattila, V.
Kaajakari, A. Oja, J.Kiihamäki, J. V. Knuuttila,
and M. M.
Salomaa, "Visualization of in- and
out-of-plane vibrations in a
micromechanical RF-resonator",
2004 IEEE International Ultrasonics, Ferroelectrics, and Frequency
Control, 50th Anniversary Joint Conference, Montréal,
Canada, August ,
2004.
- M. Koskenvuori, P. Rantakari, J. Väisäsvaara, I.
Tittonen, T. Mattila, A. Oja, V.
Kaajakari, H. Seppä, H. Kattelus, and J. Kiihamäki, "Active post-processing method to increase
the electro-mechanical coupling in microresonators", Eurosensors
17th European Conference on Solid-state Transducers, Guimarães,
Portugal, pp. 675 - 676, Sept. 21 - 24, 2003.
- V.
Kaajakari, T. Mattila, A. Oja, J. Kiihamäki,
H.
Kattelus, M. Koskenvuori, P. Rantakari, I. Tittonen, and H. Seppä,
"Square-extensional mode single-crystal silicon micromechanical
RF-resonator", Transducers'03, The 12th International Conference on
Solid-State Sensors and Actuators, Boston, USA, pp. 425-432, June 8-12,
2003.
Download
- V.
Kaajakari, T. Mattila,
J. Kiihamäki, H. Kattelus,
A.
Oja, and H. Seppä, "Nonlinearities in single-crystal silicon
micromechanical resonators", Transducers'03, The 12th International
Conference on Solid-State Sensors and Actuators, Boston, USA, pp.
1574-1577, June
8-12, 2003.
Download
- V.
Kaajakari and A. Lal, "Thermo-kinetic
actuation
for hinged structure batch microassembly", MEMS 2002, Proceedings
of
the Fifteenth Annual International Workshop on Micro Electro Mechanical
Systems,
Las Vegas, USA, pp. 196-199, January 20-24, 2002.
Download
- V.
Kaajakari and A. Lal,
"Parametric excitation of whispering gallery modes on circular
micromachined polysilicon disks", IEEE
International
Ultrasonics Symposium, Munich, Germany, pp. 1015-1018, October 8-11,
2002.
- V.
Kaajakari and A. Lal, "Optimization
of ultrasonically driven surface micromachined micromotor", IEEE
International
Ultrasonics Symposium, Atlanta, pp. 541-544, October 7-10, 2001. Winner
of the UFFC
student
paper competition.
Download
- V.
Kaajakari, A. Sathaye,
and A. Lal, "A frequency
addressable ultrasonic microfluidic actuator array", Transducers'01
and
Eurosensors XV, The 11th International Conference on Solid-State
Sensors and
Actuators, Munich, Germany, pp. 958-961, June 10-14, 2001.
Download
- V.
Kaajakari and A. Lal, "Electrostatic
batch assembly
of surface MEMS using ultrasonic triboelectricity", MEMS 2001,
Proceedings
of the Fourteenth Annual International Workshop on Micro Electro
Mechanical
Systems, Interlaken, Switzerland, pp. 10-13, January 23-27, 2001.
- V.
Kaajakari, S.-H. Kan,
L.-J. Lin, A. Lal, and S.
Rodgers, "Ultrasonic actuation for MEMS dormancy-related stiction
reduction",
Proceedings of the SPIE, vol.4180, MEMS Reliability for Critical
Applications,
Santa Clara, pp.60-65, September 20, 2000.
- V.
Kaajakari, S. Rodgers
and A. Lal, "Ultrasonically
driven surface micromachined motor", MEMS 2000, Proceedings of the
Thirteenth
Annual International Workshop on Micro Electro Mechanical Systems,
Miyazaki,
Japan, pp. 40-45, January 23-27, 2000.
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- H.-C. Lee, V.
Kaajakari, and A. Lal, "Impact
testing
of silicon micromachined beams", Proceedings of the SPIE, vol.3875,
Santa
Clara, pp.80-86, September 20-21, 1999.
- V.
Kaajakari and A. Lal, "Pulsed
ultrasonic actuation
of polysilicon surface micromachines", IEEE Ultrasonics Symposium,
Lake
Tahoe, pp. 643-646, October 17-20, 1999.
Download
- V.
Kaajakari and A. Lal, "Direct
force and temperature
measurements in ultrasonic tissue cutting", Presented at the IEEE
International
Ultrasonics Symposium, Lake Tahoe, October 17-20, 1999.
- V.
Kaajakari and A. Lal, "Pulsed
ultrasonic release and
assembly of micromachines", Transducers'99, The 10th International
Conference
on Solid-State Sensors and Actuators, Sendai, Japan, pp. 212-215, June
7-10,
1999.
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