Often_used_MEMS_formulas_v1.03.pdf - Collection of often used MEMS equations. Post it above your desk!
Practical_MEMS_errata_v1b.pdf - Errata to Practical MEMS. Please let me know if you find new mistakes and I will post them here.
yangle3.m - Matlab script to calculate the silicon Young's modulus in any crystal orientation
pangle3.m - Matlab script to calculate the silicon piezoresistive coefficients in any crystal orientation
PracticalMEMS_Chap1_Introduction.pdf - lecture notes for Chapter 1
PracticalMEMS_Chap3_Accelerometers.pdf - lecture notes for Chapter 3
Note: Lecture notes to all chapters are available in Powerpoint and pdf format for instructors adopting the textbook. Please contact the author (ville (at) kaajakari.net).
Solutions to the end of chapter problems are available in pdf format for instructors adopting the textbook. Please contact the author (ville (at) kaajakari.net).